Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System

Krutideepa Bhol

doi:doi:10.11648/j.eas.20170204.12

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Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System

Krutideepa Bhol

Published in Engineering and Applied Sciences (Volume 2, Issue 4)

Received: 28 May 2017 Accepted: 6 June 2017 Published: 11 August 2017

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Abstract

Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.

Published in	Engineering and Applied Sciences (Volume 2, Issue 4)
DOI	10.11648/j.eas.20170204.12
Page(s)	66-71
Creative Commons	This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.
Copyright	Copyright © The Author(s), 2017. Published by Science Publishing Group

Keywords

MEMS, Pressuresensor, COMSOL Multiphysics, Sensitivity

References

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Krutideepa Bhol. (2017). Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Engineering and Applied Sciences, 2(4), 66-71. https://doi.org/10.11648/j.eas.20170204.12

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Krutideepa Bhol. Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Eng. Appl. Sci. 2017, 2(4), 66-71. doi: 10.11648/j.eas.20170204.12

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AMA Style

Krutideepa Bhol. Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Eng Appl Sci. 2017;2(4):66-71. doi: 10.11648/j.eas.20170204.12

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@article{10.11648/j.eas.20170204.12,
  author = {Krutideepa Bhol},
  title = {Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System},
  journal = {Engineering and Applied Sciences},
  volume = {2},
  number = {4},
  pages = {66-71},
  doi = {10.11648/j.eas.20170204.12},
  url = {https://doi.org/10.11648/j.eas.20170204.12},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.eas.20170204.12},
  abstract = {Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.},
 year = {2017}
}

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TY  - JOUR
T1  - Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System
AU  - Krutideepa Bhol
Y1  - 2017/08/11
PY  - 2017
N1  - https://doi.org/10.11648/j.eas.20170204.12
DO  - 10.11648/j.eas.20170204.12
T2  - Engineering and Applied Sciences
JF  - Engineering and Applied Sciences
JO  - Engineering and Applied Sciences
SP  - 66
EP  - 71
PB  - Science Publishing Group
SN  - 2575-1468
UR  - https://doi.org/10.11648/j.eas.20170204.12
AB  - Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.
VL  - 2
IS  - 4
ER  -

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Krutideepa Bhol

Department of Electronics & Instrumentation Engineering, Institute of Technical Education & Research, Siksha 'O' Anusandhan University, Bhubaneswar, India

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APA Style

Krutideepa Bhol. (2017). Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Engineering and Applied Sciences, 2(4), 66-71. https://doi.org/10.11648/j.eas.20170204.12

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ACS Style

Krutideepa Bhol. Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Eng. Appl. Sci. 2017, 2(4), 66-71. doi: 10.11648/j.eas.20170204.12

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AMA Style

Krutideepa Bhol. Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System. Eng Appl Sci. 2017;2(4):66-71. doi: 10.11648/j.eas.20170204.12

Copy | Download

@article{10.11648/j.eas.20170204.12,
  author = {Krutideepa Bhol},
  title = {Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System},
  journal = {Engineering and Applied Sciences},
  volume = {2},
  number = {4},
  pages = {66-71},
  doi = {10.11648/j.eas.20170204.12},
  url = {https://doi.org/10.11648/j.eas.20170204.12},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.eas.20170204.12},
  abstract = {Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.},
 year = {2017}
}

Copy | Download

TY  - JOUR
T1  - Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System
AU  - Krutideepa Bhol
Y1  - 2017/08/11
PY  - 2017
N1  - https://doi.org/10.11648/j.eas.20170204.12
DO  - 10.11648/j.eas.20170204.12
T2  - Engineering and Applied Sciences
JF  - Engineering and Applied Sciences
JO  - Engineering and Applied Sciences
SP  - 66
EP  - 71
PB  - Science Publishing Group
SN  - 2575-1468
UR  - https://doi.org/10.11648/j.eas.20170204.12
AB  - Capacitive pressure sensors are making themselves the leader among its market competitors since they consume less power with less temperature sensitivity. This paper includes the design and development possibilities to increase the sensor sensitivity by optimizing the device dimension and including different types of materials. The figure of merits (FOMs) such as displacement, capacitance, electric potential with variation in temperature and pressure are thoroughly analyzed. This paper includes the unique developments, possible challenges with respect to design, modelling, simulation and analysis of MEMS based capacitive pressure sensors. As the range of application level of different sensors is increasing, it is indispensable to review the technological advancement and future possibilities of MEMS capacitive pressure sensors. This paper also focuses on the available reviews of various types of capacitive pressure sensor principles, geometrical design; physics based modelling, parameters analysis to consider, materials that can be used in fabrication process. The 3-D simulation is performed using COMSOL Multiphysics 5.0. During device development all the standards are followed according to the simulation standard set by COMSOL.
VL  - 2
IS  - 4
ER  -

Copy | Download